FE-SEM Tescan MAIA3 with EDS and Iridium coater
High-resolution high-vacuum Schottky field-emission Tescan SEM MAIA3 (installed in 2016). It is equipped with SE, BSE, STEM and EDS detectors (Oxford Instruments). MAIA3 is a low-voltage, low-current (1pA), immersion lens system, which can be operated at variable pressure mode (using BSE detector). Resolution is 1nm at 1kV (using beam deceleration mode (BDM)).
For sample grounding Quorum Q150T sputter coater is used. It is equipped with Iridium target, carbon and other metals, as well as crystal film thickness monitor (FTM).